Nanoscale Imaging Using a Compact Laser Plasma Source of Soft X-Rays and Extreme Ultraviolet (EUV)

Wachulak, P.; Torrisi, A.; Ayele, M.; Czwartos, J.; Bartnik, A.; Jarocki, R.; Kostecki, J.; Szczurek, M.; Wegrzynski, L.; Fiedorowicz, H.

doi:10.1007/978-3-319-73025-7_37

Application of a compact laser plasma source of soft X-rays and extreme ultraviolet (EUV) in imaging with nanometer resolution is demonstrated. The source is based on a gas puff target irradiated with nanosecond laser pulses from a small commercial Nd:YAG laser. Soft X-ray radiation in the ‘water window’ spectral range and EUV near 10 nm are generated efficiently without production of target debris. Nanoscale imaging of biological samples as well as micro- and nanostructures using transmission soft X-ray and EUV microscopy based on Fresnel optics and soft X-ray contact microscopy is demonstrated.

Nanoscale Imaging Using a Compact Laser Plasma Source of Soft X-Rays and Extreme Ultraviolet (EUV)

Wachulak P.;Torrisi A.;Ayele M.;Czwartos J.;Bartnik A.;Jarocki R.;Kostecki J.;Szczurek M.;Wegrzynski L.;Fiedorowicz H.

2018-01-01

Abstract

Application of a compact laser plasma source of soft X-rays and extreme ultraviolet (EUV) in imaging with nanometer resolution is demonstrated. The source is based on a gas puff target irradiated with nanosecond laser pulses from a small commercial Nd:YAG laser. Soft X-ray radiation in the ‘water window’ spectral range and EUV near 10 nm are generated efficiently without production of target debris. Nanoscale imaging of biological samples as well as micro- and nanostructures using transmission soft X-ray and EUV microscopy based on Fresnel optics and soft X-ray contact microscopy is demonstrated.